TY  - BOOK
AU  - MAY & SZE  
TI  - FUNDAMENTALS OF SEMICONDUCTOR FABRICATION  
T2  - N  
U1  - 621.38173042/MAY   
PY  - 0000///
CY  - JOHN WILEY & SONS, 2004.
PB  - 
N1  - B.TECH
ER  -